ChemInform Abstract: Characterization of (Methylcyclopentadienyl)trimethylplatinum and LowTemperature Organometallic Chemical Vapor Deposition of Platinum Metal. Academic Article uri icon

abstract

  • AbstractThin films of platinum are used extensively in microelectronics device processing and electrodeless metal plating.

published proceedings

  • ChemInform

author list (cited authors)

  • XUE, Z., STROUSE, M. J., SHUH, D. K., KNOBLER, C. B., KAESZ, H. D., HICKS, R. F., & WILLIAMS, R. S.

citation count

  • 0

complete list of authors

  • XUE, Z||STROUSE, MJ||SHUH, DK||KNOBLER, CB||KAESZ, HD||HICKS, RF||WILLIAMS, RS

publication date

  • March 1990

publisher