Single-digit nanometer nanoimprint templates Academic Article

authors

• Williams, R. Stanley

published proceedings

• SPIE Newsroom

author list (cited authors)

• Li, W., Wu, W., & Williams, R. S.

citation count

• 2

complete list of authors

• Li, Wen-Di||Wu, Wei||Williams, R Stanley

publication date

• July 2013

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• SPIE newsroom  Journal

Digital Object Identifier (DOI)

• 10.1117/2.1201307.004975

URL

• http://dx.doi.org/10.1117/2.1201307.004975