Atomic layer deposition of aluminum oxide on hydrophobic and hydrophilic surfaces

authors

• Williams, R. Stanley

published proceedings

• JOURNAL OF CRYSTAL GROWTH

altmetric score

• 3

author list (cited authors)

• Kobayashi, N. P., Donley, C. L., Wang, S., & Williams, R. S.

citation count

• 42

complete list of authors

• Kobayashi, Nobuhiko P||Donley, Carrie L||Wang, Shih-Yuan||Williams, R Stanley

publication date

• February 2007

publisher

• Elsevier  Publisher

published in

• Journal of Crystal Growth  Journal

keywords

• Atomic Force Microscopy
• Atomic Layer Deposition
• Oxides
• Roughening
• Surfaces

Digital Object Identifier (DOI)

• 10.1016/j.jcrysgro.2006.11.224

start page

• 218

end page

• 222

volume

• 299

issue

• 1

URL

• http://dx.doi.org/10.1016/j.jcrysgro.2006.11.224