Atomic layer deposition of aluminum oxide on hydrophobic and hydrophilic surfaces Academic Article uri icon

published proceedings

  • Journal of Crystal Growth

altmetric score

  • 3

author list (cited authors)

  • Kobayashi, N. P., Donley, C. L., Wang, S., & Williams, R. S.

citation count

  • 40

complete list of authors

  • Kobayashi, Nobuhiko P||Donley, Carrie L||Wang, Shih-Yuan||Williams, R Stanley

publication date

  • February 2007