Nanoimprint lithography with ≤60 nm overlay precision
Academic Article
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Overview
published proceedings
- Applied Physics A
author list (cited authors)
- Wu, W., Walmsley, R. G., Li, W., Li, X., & Williams, R. S.
citation count
- 17
complete list of authors
- Wu, Wei||Walmsley, Robert G||Li, Wen-Di||Li, Xuema||Williams, R Stanley
publication date
- March 2012
publisher
- Springer Science and Business Media LLC Publisher