Nanoimprint lithography with <= 60 nm overlay precision
Academic Article
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Overview
published proceedings
- APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
author list (cited authors)
- Wu, W., Walmsley, R. G., Li, W., Li, X., & Williams, R. S.
citation count
- 18
complete list of authors
- Wu, Wei||Walmsley, Robert G||Li, Wen-Di||Li, Xuema||Williams, R Stanley
publication date
- January 2012
publisher
- Springer Nature Publisher