Nanoimprint lithography with ≤60 nm overlay precision Academic Article uri icon

published proceedings

  • Applied Physics A

author list (cited authors)

  • Wu, W., Walmsley, R. G., Li, W., Li, X., & Williams, R. S.

citation count

  • 17

complete list of authors

  • Wu, Wei||Walmsley, Robert G||Li, Wen-Di||Li, Xuema||Williams, R Stanley

publication date

  • March 2012