Nanoimprint lithography with <= 60 nm overlay precision Academic Article

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authors

Williams, R. Stanley

published proceedings

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

author list (cited authors)

Wu, W., Walmsley, R. G., Li, W., Li, X., & Williams, R. S.

citation count

18

complete list of authors

Wu, Wei||Walmsley, Robert G||Li, Wen-Di||Li, Xuema||Williams, R Stanley

publication date

January 2012

publisher

Springer Nature Publisher

published in

Applied Physics A: materials science and processing Journal