Nanoimprint lithography with <= 60 nm overlay precision Academic Article

authors

• Williams, R. Stanley

published proceedings

• APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

altmetric score

• 3

author list (cited authors)

• Wu, W., Walmsley, R. G., Li, W., Li, X., & Williams, R. S.

citation count

• 18

complete list of authors

• Wu, Wei||Walmsley, Robert G||Li, Wen-Di||Li, Xuema||Williams, R Stanley

publication date

• March 2012

publisher

• Springer Nature  Publisher

published in

• Applied Physics A: materials science and processing  Journal

keywords

• 40 Engineering
• 4014 Manufacturing Engineering

Digital Object Identifier (DOI)

• 10.1007/s00339-012-6775-z

start page

• 767

end page

• 772

volume

• 106

issue

• 4

URL

• http://dx.doi.org/10.1007/s00339-012-6775-z