Issues on nanoimprint lithography with a single-layer resist structure Academic Article uri icon

published proceedings

  • APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

altmetric score

  • 3

author list (cited authors)

  • Jung, G. Y., Wu, W., Ganapathiappan, S., Ohlberg, D., Islam, M. S., Li, X., ... Williams, R. S.

citation count

  • 14

complete list of authors

  • Jung, GY||Wu, W||Ganapathiappan, S||Ohlberg, DAA||Islam, MS||Li, X||Olynick, DL||Lee, H||Chen, Y||Wang, SY||Tong, WM||Williams, RS

publication date

  • November 2005