Issues on nanoimprint lithography with a single-layer resist structure Academic Article

authors

• Williams, R. Stanley

published proceedings

• APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

altmetric score

• 3

author list (cited authors)

• Jung, G. Y., Wu, W., Ganapathiappan, S., Ohlberg, D., Islam, M. S., Li, X., ... Williams, R. S.

citation count

• 14

complete list of authors

• Jung, GY||Wu, W||Ganapathiappan, S||Ohlberg, DAA||Islam, MS||Li, X||Olynick, DL||Lee, H||Chen, Y||Wang, SY||Tong, WM||Williams, RS

publication date

• November 2005

publisher

• Springer Nature  Publisher

published in

• Applied Physics A: Materials Science and Processing  Journal

Digital Object Identifier (DOI)

• 10.1007/s00339-005-3313-2

start page

• 1331

end page

• 1335

volume

• 81

issue

• 7

URL

• http://dx.doi.org/10.1007/s00339-005-3313-2