Issues on nanoimprint lithography with a single-layer resist structure Academic Article uri icon

altmetric score

  • 3

author list (cited authors)

  • Jung, G. Y., Wu, W., Ganapathiappan, S., Ohlberg, D., Saif Islam, M., Li, X., ... Williams, R. S.

citation count

  • 14

publication date

  • November 2005