Fabrication process of molecular memory circuits by nanoimprint lithography Conference Paper

name of conference

• Microlithography 2004

authors

• Williams, R. Stanley

published proceedings

• SPIE Proceedings

author list (cited authors)

• Jung, G., Ganapathiappan, S., Li, X., Ohlberg, D., Olynick, D. L., Chen, Y., ... Williams, R. S.

citation count

• 0

complete list of authors

• Jung, Gun-Young||Ganapathiappan, S||Li, Xuema||Ohlberg, Dougleas AA||Olynick, Deidre L||Chen, Yong||Wu, Wei||Wang, Shih-Yuan||Tong, William M||Williams, RS

publication date

• May 2004

publisher

• SPIE  Publisher

published in

• 35th European Mask and Lithography Conference (EMLC 2019)  Journal

keywords

• Molecular Electronics
• Nanoimprint
• Nanotechnology

Digital Object Identifier (DOI)

• 10.1117/12.540898

International Standard Book Number (ISBN) 10

• 0-8194-5287-4

start page

• 197

end page

• 202

volume

• 5374