Nanoimprint lithography: the path toward high tech, low cost devices Conference Paper uri icon

name of conference

  • Emerging Lithographic Technologies IX

published proceedings

  • Emerging Lithographic Technologies IX, Pts 1 and 2

author list (cited authors)

  • Tong, W. M., Hector, S. D., Jung, G. Y., Wu, W., Ellenson, J., Kramer, K., ... Williams, R. S.

citation count

  • 8

complete list of authors

  • Tong, WM||Hector, SD||Jung, GY||Wu, W||Ellenson, J||Kramer, K||Hostetler, T||Richards, SK||Williams, RS

editor list (cited editors)

  • Mackay, R. S.

publication date

  • May 2005