Nanoimprint lithography: the path toward high-tech, low-cost devices (Keynote Paper) Conference Paper uri icon

name of conference

  • Microlithography 2005

published proceedings

  • SPIE Proceedings

author list (cited authors)

  • Tong, W. M., Hector, S. D., Jung, G., Wu, W., Ellenson, J., Kramer, K., ... Williams, R. S.

citation count

  • 8

complete list of authors

  • Tong, William M||Hector, Scott D||Jung, Gun-Young||Wu, Wei||Ellenson, James||Kramer, Kenneth||Hostetler, Timothy||Richards, Susan K||Williams, RS

publication date

  • May 2005