Nanoimprint lithography: the path toward high tech, low cost devices
Conference Paper
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- Overview
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- Research
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- Identity
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- Additional Document Info
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- Other
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Overview
name of conference
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Emerging Lithographic Technologies IX
published proceedings
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Emerging Lithographic Technologies IX, Pts 1 and 2
author list (cited authors)
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Tong, W. M., Hector, S. D., Jung, G. Y., Wu, W., Ellenson, J., Kramer, K., ... Williams, R. S.
citation count
complete list of authors
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Tong, WM||Hector, SD||Jung, GY||Wu, W||Ellenson, J||Kramer, K||Hostetler, T||Richards, SK||Williams, RS
editor list (cited editors)
publication date
publisher
published in
Research
keywords
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Cost Of Ownership
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Disruptive Technology
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Nanoimprint Lithography
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Ngl
Identity
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
Additional Document Info
start page
end page
volume
Other
URL
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http://dx.doi.org/10.1117/12.607236