Nanoimprint lithography: the path toward high tech, low cost devices Conference Paper

name of conference

• Emerging Lithographic Technologies IX

authors

• Williams, R. Stanley

published proceedings

• Emerging Lithographic Technologies IX, Pts 1 and 2

author list (cited authors)

• Tong, W. M., Hector, S. D., Jung, G. Y., Wu, W., Ellenson, J., Kramer, K., ... Williams, R. S.

citation count

• 8

complete list of authors

• Tong, WM||Hector, SD||Jung, GY||Wu, W||Ellenson, J||Kramer, K||Hostetler, T||Richards, SK||Williams, RS

editor list (cited editors)

• Mackay, R. S.

publication date

• May 2005

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Cost Of Ownership
• Disruptive Technology
• Nanoimprint Lithography
• Ngl

Digital Object Identifier (DOI)

• 10.1117/12.607236

International Standard Book Number (ISBN) 10

• 0-8194-5731-0

start page

• 46

end page

• 55

volume

• 5751

URL

• http://dx.doi.org/10.1117/12.607236