Surface engineering for resolution enhancement in nanoimprint lithography Conference Paper uri icon

name of conference

  • Microlithography 2005

published proceedings

  • SPIE Proceedings

author list (cited authors)

  • Jung, G. Y., Wu, W., Li, Z., Wang, S. Y., Tong, W. M., & Williams, R. S.

citation count

  • 1

complete list of authors

  • Jung, GY||Wu, W||Li, Z||Wang, SY||Tong, William M||Williams, RS

publication date

  • May 2005

publisher