Surface engineering for resolution enhancement in nanoimprint lithography
Conference Paper
-
- Overview
-
- Research
-
- Identity
-
- Additional Document Info
-
- Other
-
- View All
-
Overview
name of conference
-
Emerging Lithographic Technologies IX
published proceedings
-
Emerging Lithographic Technologies IX, Pts 1 and 2
author list (cited authors)
-
Jung, G. Y., Wu, W., Li, Z., Wang, S. Y., Tong, W. M., & Williams, R. S.
citation count
complete list of authors
-
Jung, GY||Wu, W||Li, Z||Wang, SY||Tong, WM||Williams, RS
editor list (cited editors)
publication date
publisher
published in
Research
keywords
-
Capillary Action
-
Lithography
-
Nanoimprint
-
Surface Energy
-
Surface Linker
-
Uv Process
Identity
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
Additional Document Info
start page
end page
volume
Other
URL
-
http://dx.doi.org/10.1117/12.599793