A replacement of high-k process for CMOS transistor by atomic layer deposition uri icon

published proceedings

  • SEMICONDUCTOR SCIENCE AND TECHNOLOGY

author list (cited authors)

  • Han, J., Choi, B. J., Yang, J. J., Moon, D., Choi, Y., Williams, R. S., & Meyyappan, M.

citation count

  • 4

publication date

  • August 2013