A replacement of high-k process for CMOS transistor by atomic layer deposition Academic Article uri icon

published proceedings

  • Semiconductor Science and Technology

author list (cited authors)

  • Han, J., Choi, B. J., Yang, J. J., Moon, D., Choi, Y., Williams, R. S., & Meyyappan, M.

citation count

  • 4

complete list of authors

  • Han, Jin-Woo||Choi, Byung Joon||Yang, J Joshua||Moon, Dong-Il||Choi, Yang-Kyu||Williams, R Stanley||Meyyappan, M

publication date

  • August 2013