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Two-Stage Atomic Layer Deposition of Aluminum Oxide on Alkanethiolate Self-Assembled Monolayers Using
n
-Propanol and Water as Oxygen Sources
Academic Article
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Research
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Overview
authors
Williams, R. Stanley
published proceedings
CHEMISTRY OF MATERIALS
altmetric score
3
author list (cited authors)
Kobayashi, N. P., & Williams, R. S.
citation count
12
publication date
August 2008
publisher
American Chemical Society (ACS)
Publisher
published in
CHEMISTRY OF MATERIALS
Journal
Research
keywords
34 Chemical Sciences
3406 Physical Chemistry
40 Engineering
Identity
Digital Object Identifier (DOI)
10.1021/cm702848y
Additional Document Info
start page
5356
end page
5360
volume
20
issue
16
Other
URL
http://dx.doi.org/10.1021/cm702848y