Two-Stage Atomic Layer Deposition of Aluminum Oxide on Alkanethiolate Self-Assembled Monolayers Using n-Propanol and Water as Oxygen Sources Academic Article uri icon

published proceedings

  • Chemistry of Materials

altmetric score

  • 3

author list (cited authors)

  • Kobayashi, N. P., & Williams, R. S.

citation count

  • 11

complete list of authors

  • Kobayashi, Nobuhiko P||Williams, R Stanley

publication date

  • August 2008