Influence of HCl on the chemical vapor deposition and etching of Ge islands on Si(001)
Academic Article
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Overview
published proceedings
- APPLIED PHYSICS LETTERS
author list (cited authors)
- Kamins, T. I., Briggs, G., & Williams, R. S.
citation count
- 23
complete list of authors
- Kamins, TI||Briggs, GAD||Williams, RS
publication date
- September 1998
publisher
- AIP Publishing Publisher
published in
- Applied Physics Letters Journal