Influence of HCl on the chemical vapor deposition and etching of Ge islands on Si(001) Academic Article uri icon

published proceedings

  • Applied Physics Letters

author list (cited authors)

  • Kamins, T. I., Briggs, G., & Williams, R. S.

citation count

  • 23

complete list of authors

  • Kamins, TI||Briggs, GAD||Williams, R Stanley

publication date

  • September 1998