Surface deformation of metal films under controlled pressure for generating ultra-flat metal surfaces Conference Paper uri icon

published proceedings

  • MATERIALS, PROCESSES, INTEGRATION AND RELIABILITY IN ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS

author list (cited authors)

  • Vj, L., Chan, M., Islam, M. S., Horsley, D. A., Wu, W., Wang, S. Y., & Williams, R. S.

complete list of authors

  • Vj, Logeeswaran||Chan, Mei-Lin||Islam, M Saif||Horsley, David A||Wu, Wei||Wang, Shih Yuan||Williams, R Stanley

publication date

  • January 1, 2007 11:11 AM