Ultra-smooth platinum surfaces for nanoscale devices fabricated using chemical mechanical polishing
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APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
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Islam, M. S., Jung, G. Y., Ha, T., Stewart, D. R., Chen, Y., Wang, S. Y., & Williams, R. S.
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Islam, MS||Jung, GY||Ha, T||Stewart, DR||Chen, Y||Wang, SY||Williams, RS
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http://dx.doi.org/10.1007/s00339-004-3170-4