Ultra-smooth platinum surfaces for nanoscale devices fabricated using chemical mechanical polishing Academic Article uri icon

published proceedings

  • Applied Physics A

author list (cited authors)

  • Saif Islam, M., Jung, G. Y., Ha, T., Stewart, D. R., Chen, Y., Wang, S. Y., & Williams, R. S.

citation count

  • 23

complete list of authors

  • Saif Islam, M||Jung, GY||Ha, T||Stewart, DR||Chen, Y||Wang, SY||Williams, R Stanley

publication date

  • March 2005