Ultra-smooth platinum surfaces for nanoscale devices fabricated using chemical mechanical polishing Academic Article uri icon

published proceedings

  • APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

author list (cited authors)

  • Islam, M. S., Jung, G. Y., Ha, T., Stewart, D. R., Chen, Y., Wang, S. Y., & Williams, R. S.

citation count

  • 23

complete list of authors

  • Islam, MS||Jung, GY||Ha, T||Stewart, DR||Chen, Y||Wang, SY||Williams, RS

publication date

  • March 2005