Chlorination of Si surfaces with gaseous hydrogen chloride at elevated temperatures Academic Article

authors

• Williams, R. Stanley

published proceedings

• SURFACE SCIENCE

author list (cited authors)

• Li, Z. Y., Kamins, T. I., Li, X. M., & Williams, R. S.

citation count

• 6

complete list of authors

• Li, ZY||Kamins, TI||Li, XM||Williams, RS

publication date

• April 2004

publisher

• Elsevier  Publisher

published in

• Surface Science  Journal

keywords

• Atomic Force Microscopy
• Chlorine
• Silicon
• X-ray Photoelectron Spectroscopy

Digital Object Identifier (DOI)

• 10.1016/j.susc.2004.01.057

start page

• L81

end page

• L86

volume

• 554

issue

• 1