Chlorination of Si surfaces with gaseous hydrogen chloride at elevated temperatures Academic Article uri icon

published proceedings

  • Surface Science

author list (cited authors)

  • Li, Z., Kamins, T. I., Li, X., & Williams, R. S.

citation count

  • 6

complete list of authors

  • Li, Zhiyong||Kamins, Theodore I||Li, Xuema||Williams, R Stanley

publication date

  • April 2004