Chlorination of Si surfaces with gaseous hydrogen chloride at elevated temperatures Academic Article uri icon

published proceedings


author list (cited authors)

  • Li, Z. Y., Kamins, T. I., Li, X. M., & Williams, R. S.

citation count

  • 6

complete list of authors

  • Li, ZY||Kamins, TI||Li, XM||Williams, RS

publication date

  • April 2004