Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography Academic Article uri icon

published proceedings

  • Nano Letters

altmetric score

  • 6

author list (cited authors)

  • Jung, G. Y., Ganapathiappan, S., Ohlberg, D., Olynick, D. L., Chen, Y., Tong, W. M., & Williams, R. S.

citation count

  • 84

complete list of authors

  • Jung, GY||Ganapathiappan, S||Ohlberg, Douglas AA||Olynick, Deirdre L||Chen, Y||Tong, William M||Williams, R Stanley

publication date

  • July 2004