Fabrication of a 34 x 34 crossbar structure at 50 nm half-pitch by UV-based nanoimprint lithography Academic Article uri icon

published proceedings


altmetric score

  • 6

author list (cited authors)

  • Jung, G. Y., Ganapathiappan, S., Ohlberg, D., Olynick, D. L., Chen, Y., Tong, W. M., & Williams, R. S.

citation count

  • 85

complete list of authors

  • Jung, GY||Ganapathiappan, S||Ohlberg, DAA||Olynick, DL||Chen, Y||Tong, WM||Williams, RS

publication date

  • June 2004