Fabrication of a 34 x 34 crossbar structure at 50 nm half-pitch by UV-based nanoimprint lithography Academic Article

authors

• Williams, R. Stanley

published proceedings

• NANO LETTERS

altmetric score

• 6

author list (cited authors)

• Jung, G. Y., Ganapathiappan, S., Ohlberg, D., Olynick, D. L., Chen, Y., Tong, W. M., & Williams, R. S.

citation count

• 85

complete list of authors

• Jung, GY||Ganapathiappan, S||Ohlberg, DAA||Olynick, DL||Chen, Y||Tong, WM||Williams, RS

publication date

• June 2004

publisher

• American Chemical Society (ACS)  Publisher

published in

• Nano Letters: a journal dedicated to nanoscience and nanotechnology  Journal

Digital Object Identifier (DOI)

• 10.1021/nl049487q

start page

• 1225

end page

• 1229

volume

• 4

issue

• 7