DEPOSITION OF TRANSITION-METAL AND MIXED METAL THIN-FILMS FROM ORGANOMETALLIC PRECURSORS Conference Paper uri icon

author list (cited authors)

  • KAESZ, H. D., WILLIAMS, R. S., HICKS, R. F., ZINK, J. I., CHEN, Y. J., MULLER, H. J., ... KIM, Y. K.

publication date

  • January 1, 1990 11:11 AM