LOW-ENERGY AR ION-BOMBARDMENT DAMAGE OF SI, GAAS, AND INP SURFACES Academic Article

authors

• Williams, R. Stanley

published proceedings

• SOLID STATE COMMUNICATIONS

author list (cited authors)

• WILLIAMS, R. S.

citation count

• 55

complete list of authors

• WILLIAMS, RS

publication date

• January 1982

publisher

• Elsevier  Publisher

published in

• Solid State Communications  Journal

Digital Object Identifier (DOI)

• 10.1016/0038-1098(82)91056-0

start page

• 153

end page

• 156

volume

• 41

issue

• 2