DEPTH RESOLUTION DEGRADATION OF SPUTTER-PROFILED INP-INXGA1-XASYP1-Y INTERFACES CAUSED BY CONE FORMATION Academic Article uri icon

published proceedings

  • APPLIED PHYSICS LETTERS

author list (cited authors)

  • WILLIAMS, R. S., NELSON, R. J., & SCHLIER, A. R.

citation count

  • 22

complete list of authors

  • WILLIAMS, RS||NELSON, RJ||SCHLIER, AR

publication date

  • May 1980