DEPTH RESOLUTION DEGRADATION OF SPUTTER-PROFILED INP-INXGA1-XASYP1-Y INTERFACES CAUSED BY CONE FORMATION
Academic Article
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Overview
published proceedings
- APPLIED PHYSICS LETTERS
author list (cited authors)
- WILLIAMS, R. S., NELSON, R. J., & SCHLIER, A. R.
citation count
- 22
complete list of authors
- WILLIAMS, RS||NELSON, RJ||SCHLIER, AR
publication date
- May 1980
publisher
- AIP Publishing Publisher
published in
- Applied Physics Letters Journal