Depth resolution degradation of sputter‐profiled InP/InxGa1−xAsyP1−yinterfaces caused by cone formation Academic Article uri icon

published proceedings

  • Applied Physics Letters

author list (cited authors)

  • Williams, R. S., Nelson, R. J., & Schlier, A. R.

citation count

  • 22

complete list of authors

  • Williams, RS||Nelson, RJ||Schlier, AR

publication date

  • May 1980