Depth resolution degradation of sputter‐profiled InP/InxGa1−xAsyP1−yinterfaces caused by cone formation Academic Article

authors

• Williams, R. Stanley

published proceedings

• Applied Physics Letters

author list (cited authors)

• Williams, R. S., Nelson, R. J., & Schlier, A. R.

citation count

• 22

complete list of authors

• Williams, RS||Nelson, RJ||Schlier, AR

publication date

• May 1980

publisher

• AIP Publishing  Publisher

published in

• Applied Physics Letters  Journal

Digital Object Identifier (DOI)

• 10.1063/1.91332

start page

• 827

end page

• 829

volume

• 36

issue

• 10