Depth resolution degradation of sputter‐profiled InP/InxGa1−xAsyP1−yinterfaces caused by cone formation
Academic Article
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Overview
published proceedings
- Applied Physics Letters
author list (cited authors)
- Williams, R. S., Nelson, R. J., & Schlier, A. R.
citation count
- 22
complete list of authors
- Williams, RS||Nelson, RJ||Schlier, AR
publication date
- May 1980
publisher
- AIP Publishing Publisher
published in
- Applied Physics Letters Journal