Chemical vapor deposition of Si nanowires nucleated by TiSi2 islands on Si Academic Article

authors

• Williams, R. Stanley

published proceedings

• APPLIED PHYSICS LETTERS

altmetric score

• 3

author list (cited authors)

• Kamins, T. I., Williams, R. S., Chen, Y., Chang, Y. L., & Chang, Y. A.

citation count

• 144

complete list of authors

• Kamins, TI||Williams, RS||Chen, Y||Chang, YL||Chang, YA

publication date

• January 2000

publisher

• AIP Publishing  Publisher

published in

• Applied Physics Letters  Journal

keywords

• Bioengineering
• Nanotechnology

Digital Object Identifier (DOI)

• 10.1063/1.125852

start page

• 562

end page

• 564

volume

• 76

issue

• 5