Vapor-Phase Self-Assembled Monolayer for Improved Mold Release in Nanoimprint Lithography Academic Article uri icon

author list (cited authors)

  • Jung, G., Li, Z., Wu, W., Chen, Y., Olynick, D. L., Wang, S., Tong, W. M., & Williams, R. S.

publication date

  • January 1, 2005 11:11 AM