Improved Pattern Transfer in Nanoimprint Lithography at 30 nm Half-Pitch by Substrate−Surface Functionalization Academic Article uri icon

author list (cited authors)

  • Jung, G., Li, Z., Wu, W., Ganapathiappan, S., Li, X., Olynick, D. L., ... Williams, R. S.

publication date

  • January 1, 2005 11:11 AM