LASER-DRIVEN CHEMICAL VAPOR-DEPOSITION OF PLATINUM AT ATMOSPHERIC-PRESSURE AND ROOM-TEMPERATURE FROM CPPT(CH3)3 Academic Article uri icon

abstract

  • Photolysis of CpPt(Me)3(Cp=5-C5H5, Me=CH3) at room temperature and atmospheric pressure produces thin films and patterned structures of platinum metal on solid substrates. The platinum films are characterized by Auger electron spectroscopy, x-ray diffraction, and scanning electron microscopy. Substrates can also be prepatterned by laser irradiation and then developed into a shiny platinum deposit at a later time.

published proceedings

  • APPLIED PHYSICS LETTERS

altmetric score

  • 3

author list (cited authors)

  • KOPLITZ, L. V., SHUH, D. K., CHEN, Y. J., WILLIAMS, R. S., & ZINK, J. I.

citation count

  • 29

publication date

  • October 1988