Surface properties of platinum thin films as a function of plasma treatment conditions Academic Article

authors

• Williams, R. Stanley

published proceedings

• SURFACE SCIENCE

author list (cited authors)

• Li, Z. Y., Beck, P., Ohlberg, D., Stewart, D. R., & Williams, R. S.

citation count

• 51

complete list of authors

• Li, ZY||Beck, P||Ohlberg, DAA||Stewart, DR||Williams, RS

publication date

• April 2003

publisher

• Elsevier  Publisher

published in

• Surface Science  Journal

keywords

• Atomic Force Microscopy
• Metallic Films
• Plasma Processing
• Platinum
• Surface Structure, Morphology, Roughness, And Topography
• X-ray Photoelectron Spectroscopy

Digital Object Identifier (DOI)

• 10.1016/S0039-6028(03)00015-3

start page

• 410

end page

• 418

volume

• 529

issue

• 3