Deposition and structure of chemically vapor deposited nanoscale Ti-Si islands on Si Academic Article

authors

• Williams, R. Stanley

published proceedings

• JOURNAL OF APPLIED PHYSICS

author list (cited authors)

• Kamins, T. I., Ohlberg, D., & Williams, R. S.

citation count

• 4

complete list of authors

• Kamins, TI||Ohlberg, DAA||Williams, RS

publication date

• November 2004

publisher

• AIP Publishing  Publisher

published in

• Journal of Applied Physics  Journal

Digital Object Identifier (DOI)

• 10.1063/1.1789626

start page

• 5195

end page

• 5201

volume

• 96

issue

• 9