Deposition and structure of chemically vapor deposited nanoscale Ti-Si islands on Si Academic Article uri icon

published proceedings

  • Journal of Applied Physics

author list (cited authors)

  • Kamins, T. I., Ohlberg, D., & Williams, R. S.

citation count

  • 4

complete list of authors

  • Kamins, TI||Ohlberg, DAA||Williams, R Stanley

publication date

  • November 2004