CHARACTERIZATION OF PULSED SUPERSONIC CVD SYSTEM FOR DIAMOND GROWTH Conference Paper

abstract

• ABSTRACTAn ultra-high vacuum chemical vapor deposition system using pulsed, supersonic jets of halogenated hydrocarbon precursors has been constructed with the intention of growing diamond thin films. Experimental results from this system should determine whether the hyperthermal activation of precursors improves the carbon incorporation efficiency of film growth. The jets, produced by commercially available pulsed valves, were characterized with a fast ionization gauge. Parameters such as valve backing pressure and the pulse width were varied to optimize material flux and avoid the formation of boundary layers above the substrate that could reduce the kinetic energy of the precursors.

authors

• Williams, R. Stanley

published proceedings

• NOVEL FORMS OF CARBON II

author list (cited authors)

• OHLBERG, D., REN, J., & WILLIAMS, R. S.

citation count

• 0

complete list of authors

• OHLBERG, DAA||REN, J||WILLIAMS, RS

publication date

• 1994

publisher

• Springer Nature  Publisher

published in

• MRS Online Proceedings Library  Journal

keywords

• 34 Chemical Sciences
• 40 Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1557/PROC-349-433

International Standard Book Number (ISBN) 10

• 1-55899-249-9

start page

• 433

end page

• 438

volume

• 349

URL

• http://dx.doi.org/10.1557/proc-349-433