Annealing of chemically vapor deposited nanoscale Ti-Si islands on Si Academic Article uri icon

published proceedings

  • APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

author list (cited authors)

  • Kamins, T. I., Williams, R. S., & Ohlberg, D.

citation count

  • 1

complete list of authors

  • Kamins, TI||Williams, RS||Ohlberg, DAA

publication date

  • March 2005