Flexible mid-infrared photonics for chemical sensing Patent uri icon


  • A flexible waveguide structure including a waveguide on a flexible substrate, both having transparent windows in the mid-infrared range, may serve as a photonic chemical sensor for measuring characteristic absorptions of analytes brought in physical contact with the waveguide. Such a sensor may, in accordance with some embodiments, be formed by an aluminum-nitride waveguide on a borosilicate substrate.

author list (cited authors)

  • Lin, P. T.

complete list of authors

  • Lin, Pao Tai

publication date

  • March 2020