Flexible mid-infrared photonics for chemical sensing
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abstract
A flexible waveguide structure including a waveguide on a flexible substrate, both having transparent windows in the mid-infrared range, may serve as a photonic chemical sensor for measuring characteristic absorptions of analytes brought in physical contact with the waveguide. Such a sensor may, in accordance with some embodiments, be formed by an aluminum-nitride waveguide on a borosilicate substrate.