SEM Image Denoising and Contour Image Estimation using Deep Learning Conference Paper

authors

• Savari, Serap

published proceedings

• 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

author list (cited authors)

• Chaudhary, N., Savari, S. A., Brackmann, V., & Friedrich, M.

citation count

• 1

complete list of authors

• Chaudhary, Narendra||Savari, Serap A||Brackmann, Varvara||Friedrich, Michael

publication date

• August 2020

publisher

• IEEE  Publisher

published in

• ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings  Journal

keywords

• Deep Convolutional Neural Networks
• Deep Learning
• Denoising
• Line Edge Roughness
• Sem Metrology

Digital Object Identifier (DOI)

• 10.1109/asmc49169.2020.9185250

start page

• 1

end page

• 6

volume

• 00

URL

• http://dx.doi.org/10.1109/asmc49169.2020.9185250