Real-Time and Label-Free Chemical Sensor-on-a-chip using Monolithic Si-on-BaTiO3 Mid-Infrared waveguides. Academic Article uri icon


  • Chip-scale chemical detection is demonstrated by using mid-Infrared (mid-IR) photonic circuits consisting of amorphous silicon (a-Si) waveguides on an epitaxial barium titanate (BaTiO3, BTO) thin film. The highly c-axis oriented BTO film was grown by the pulsed laser deposition (PLD) method and it exhibits a broad transparent window from =2.5m up to 7m. The waveguide structure was fabricated by the complementary metal-oxide-semiconductor (CMOS) process and a sharp fundamental waveguide mode has been observed. By scanning the spectrum within the characteristic absorption regime, our mid-IR waveguide successfully perform label-free monitoring of various organic solvents. The real-time heptane detection is accomplished by measuring the intensity attenuation at =3.0-3.2m, which is associated with -CH absorption. While for methanol detection, we track the -OH absorption at =2.8-2.9m. Our monolithic Si-on-BTO waveguides establish a new sensor platform that enables integrated photonic device for label-free chemical detection.

published proceedings

  • Sci Rep

author list (cited authors)

  • Jin, T., Li, L., Zhang, B., Lin, H., Wang, H., & Lin, P. T.

citation count

  • 21

complete list of authors

  • Jin, Tiening||Li, Leigang||Zhang, Bruce||Lin, Hao-Yu Greg||Wang, Haiyan||Lin, Pao Tai

publication date

  • July 2017