Novel MEMS devices and silicon micromachined components for high frequency circuits Conference Paper

name of conference

• MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication

authors

• Katehi, Linda

published proceedings

• MEMS COMPONENTS AND APPLICATIONS FOR INDUSTRY, AUTOMOBILES, AEROSPACE, AND COMMUNICATION

author list (cited authors)

• Katehi, L.

citation count

• 0

complete list of authors

• Katehi, LPB

editor list (cited editors)

• Helvajian, H., Janson, S. W., & Laermer, F.

publication date

• October 2001

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

Digital Object Identifier (DOI)

• 10.1117/12.443041

International Standard Book Number (ISBN) 10

• 0-8194-4287-9

start page

• 60

end page

• 65

volume

• 4559

URL

• http://dx.doi.org/10.1117/12.443041