High performance micro-machined inductors on CMOS substrate Conference Paper

name of conference

• IEEE MTT-S International Microwave Symposium Digest, 2005.

authors

• Katehi, Linda

published proceedings

• 2005 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-4

author list (cited authors)

• Weon, D. H., Kim, J. I., Jeon, J. H., Mohammadi, S., & Katehi, L.

citation count

• 11

complete list of authors

• Weon, DH||Kim, JI||Jeon, JH||Mohammadi, S||Katehi, LPB

publication date

• January 2005

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• Cmos Compatible
• High Frequency
• High Quality Factor
• Integrated Inductor
• Micromachining
• Stressed Metal
• Three Dimensional

Digital Object Identifier (DOI)

• 10.1109/MWSYM.2005.1516705

International Standard Book Number (ISBN) 10

• 0-7803-8845-3

start page

• 701

end page

• 704

URL

• http://dx.doi.org/10.1109/mwsym.2005.1516705