AC actuation of fixed-fixed beam MEMS switches Conference Paper

name of conference

• Digest of Papers. 2005 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2005.

authors

• Katehi, Linda

published proceedings

• 2006 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS

author list (cited authors)

• Wang, X., Katehi, L., & Peroulis, D.

citation count

• 1

complete list of authors

• Wang, X||Katehi, LPB||Peroulis, D

publication date

• January 2006

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• Ac Actuation
• Electrostatic Actuation
• MEMS
• Switches

Digital Object Identifier (DOI)

• 10.1109/smic.2005.1587894

International Standard Book Number (ISBN) 10

• 0-7803-9472-0

start page

• 24

end page

• +

URL

• http://dx.doi.org/10.1109/smic.2005.1587894