Polymer-membrane-supported fin-line frequency multipliers
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abstract
Two polymer-membrane-supported fin-line frequency multipliers were successfully realized on a 7-micron thick polymer membrane at a temperature below 100/spl deg/C, using the previously published polymer-membrane based micromachining technologies. The said multipliers can generate from a microwave source a signal well beyond 100 GHz in the absence of any DC bias. Spectral domain measurements have been carried out on these frequency multipliers, and the experimental results suggest that the polymer-membrane based micromachining technologies can be used for realization of circuits operating at G-band frequencies.
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2002 3rd International Conference on Microwave and Millimeter Wave Technology, 2002. Proceedings. ICMMT 2002.