RF MEMS and Si micromachining in high frequency applications Conference Paper

abstract

• RF MEMS and Si micromachining are key technologies in obtaining low-size, low-weight, and low-cost components for the coming generation of communications systems. These technologies allow both the development of high-performance microwave/millimeter-wave switches and switch-based tunable subsystems, as well as innovative and efficient architectures for interconnecting and packaging. The design of a low-voltage capacitive and a low-resistance DC-contact switch are discussed. We also focus on a broadband low-loss on-wafer packaging scheme developed for the capacitive MEMS switch.

name of conference

• Proceedings RAWCON 2002. 2002 IEEE Radio and Wireless Conference (Cat. No.02EX573)

authors

• Katehi, Linda

published proceedings

• RAWCON 2002: IEEE RADIO AND WIRELESS CONFERENCE, PROCEEDINGS

author list (cited authors)

• Peroulis, D., Margomenos, A., & Katehi, L.

citation count

• 3

complete list of authors

• Peroulis, D||Margomenos, A||Katehi, LPB

publication date

• January 2002

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• 0.70 Ohm
• 40 Ghz
• 9 V
• Application Software
• Broadband Low-loss On-wafer Packaging
• Capacitive Mems Switch
• Circuits
• Communications Systems
• Efficient Architecture
• Hf Applications
• High Frequency Applications
• Innovative Architecture
• Interconnection Architecture
• Low-cost Components
• Low-voltage Capacitive Dc-contact Switch
• Low-weight Components
• Micromachining
• Micromechanical Devices
• Microswitches
• Microwave Switches
• Microwave Technology
• Microwave/millimeter-wave Switches
• Packaging
• Radio Frequency
• Radiofrequency Microelectromechanical Systems
• Rf Mems
• Si
• Silicon
• Silicon Micromachining
• Switch-based Tunable Subsystems
• Switches
• Voltage

Digital Object Identifier (DOI)

• 10.1109/rawcon.2002.1030168

International Standard Book Number (ISBN) 10

• 0-7803-7458-4

start page

• 265

end page

• 268

URL

• http://dx.doi.org/10.1109/rawcon.2002.1030168