Electromechanical considerations in developing low-voltage RF MEMS switches Academic Article

abstract

• This paper reports on the design, fabrication, and testing of a low-actuation voltage Microelectromechanical systems (MEMS) switch for high-frequency applications. The mechanical design of low spring-constant folded-suspension beams is presented first, and switches using these beams are demonstrated with measured actuation voltages of as low as 6 V. Furthermore, common nonidealities such as residual in-plane and gradient stress, as well as down-state stiction problems are addressed, and possible solutions are discussed. Finally, both experimental and theoretical data for the dynamic behavior of these devices are presented. The results of this paper clearly underline the need of an integrated design approach for the development of ultra low-voltage RF MEMS switches.

authors

• Katehi, Linda

published proceedings

• IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

altmetric score

• 6

author list (cited authors)

• Peroulis, D., Pacheco, S. P., Sarabandi, K., & Katehi, L.

citation count

• 227

complete list of authors

• Peroulis, D||Pacheco, SP||Sarabandi, K||Katehi, LPB

publication date

• January 2003

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions on Microwave Theory and Techniques  Journal

keywords

• Low Actuation Voltage
• Microelectromechanical Systems (mems) Switches
• Residual Stress
• Spring Constant
• Switching Speed
• Top-electrode Switches

Digital Object Identifier (DOI)

• 10.1109/TMTT.2002.806514

start page

• 259

end page

• 270

volume

• 51

issue

• 1

URL

• http://dx.doi.org/10.1109/tmtt.2002.806514