Electrostatically-tunable analog RF MEMS varactors with measured capacitance range of 300% Conference Paper

abstract

• This paper reports on the design, fabrication, and testing of a novel analog MEMS varactor with measured tuning range of 300%. The proposed electrostatically actuated varactor is based on a parallel-plate approach and is best suited for microwave/millimeter-wave applications. The measured capacitance values are in the range of 40-160 fF and are achieved with DC voltages of 20-34 V. The proposed varactor has the additional advantages of very high resonant frequency (its series measured parasitic inductance is 9 pH) and high quality factor (higher than 80 at 40 GHz).

name of conference

• IEEE MTT-S International Microwave Symposium Digest, 2003

authors

• Katehi, Linda

published proceedings

• 2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3

author list (cited authors)

• Peroulis, D., & Katehi, L.

complete list of authors

• Peroulis, D||Katehi, LPB

publication date

• January 2003

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 20 To 34 V
• 40 Ghz
• 40 To 160 Ff
• Analog Mems Varactor
• Capacitance
• Capacitance Measurement
• Capacitance Range
• Dc Voltages
• Electrostatic Measurements
• Electrostatically-tunable Varactors
• Fabrication
• Frequency Measurement
• Inductance Measurement
• Micromechanical Devices
• Microwave Applications
• Microwave Diodes
• Millimeter Wave Measurements
• Millimeter-wave Applications
• Millimetre Wave Diodes
• Parallel-plate Approach
• Parasitic Inductance
• Q-factor
• Quality Factor
• Radiofrequency Microelectromechanical Systems
• Resonant Frequency
• Testing
• Varactors

International Standard Book Number (ISBN) 10

• 0-7803-7695-1

start page

• 1793

end page

• 1796

volume

• 3