Toroidal Inductors for Radio-Frequency Integrated Circuits
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Toroidal inductors achieve low loss by constraining magnetic flux to a well-defined path and away from ground planes and semiconducting substrates. This paper presents a micromachined implementation of the toroidal inductor, with focus primarily on microwave integrated circuits on a low-resistivity silicon wafer achieving a Q of 22 and a self-resonant frequency greater than 10 GHz. A verified analytic model is developed.
IEEE Transactions on Microwave Theory and Techniques
author list (cited authors)
Liu, W. Y., Suryanarayanan, J., Nath, J., Mohammadi, S., Katehi, L., & Steer, M. B.
complete list of authors
Liu, WY||Suryanarayanan, J||Nath, J||Mohammadi, S||Katehi, LPB||Steer, MB