Toroidal inductors for radio-frequency integrated circuits Academic Article

abstract

• Toroidal inductors achieve low loss by constraining magnetic flux to a well-defined path and away from ground planes and semiconducting substrates. This paper presents a micromachined implementation of the toroidal inductor, with focus primarily on microwave integrated circuits on a low-resistivity silicon wafer achieving a Q of 22 and a self-resonant frequency greater than 10 GHz. A verified analytic model is developed.

authors

• Katehi, Linda

published proceedings

• IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES

author list (cited authors)

• Liu, W. Y., Suryanarayanan, J., Nath, J., Mohammadi, S., Katehi, L., & Steer, M. B.

citation count

• 27

complete list of authors

• Liu, WY||Suryanarayanan, J||Nath, J||Mohammadi, S||Katehi, LPB||Steer, MB

publication date

• February 2004

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions on Microwave Theory and Techniques  Journal

keywords

• Inductor
• Micromachining
• Monolithic Microwave Integrated Circuit (mmic)
• Radio-frequency Integrated Circuit (rfic)
• Toroidal Inductor

Digital Object Identifier (DOI)

• 10.1109/TMTT.2003.822019

start page

• 646

end page

• 654

volume

• 52

issue

• 2

URL

• http://dx.doi.org/10.1109/tmtt.2003.822019