Toroidal Inductors for Radio-Frequency Integrated Circuits Academic Article uri icon


  • Toroidal inductors achieve low loss by constraining magnetic flux to a well-defined path and away from ground planes and semiconducting substrates. This paper presents a micromachined implementation of the toroidal inductor, with focus primarily on microwave integrated circuits on a low-resistivity silicon wafer achieving a Q of 22 and a self-resonant frequency greater than 10 GHz. A verified analytic model is developed.

published proceedings

  • IEEE Transactions on Microwave Theory and Techniques

author list (cited authors)

  • Liu, W. Y., Suryanarayanan, J., Nath, J., Mohammadi, S., Katehi, L., & Steer, M. B.

citation count

  • 27

complete list of authors

  • Liu, WY||Suryanarayanan, J||Nath, J||Mohammadi, S||Katehi, LPB||Steer, MB

publication date

  • February 2004