High-Q Integrated 3-D Inductors and Transformers for High Frequency Applications Conference Paper uri icon


  • Using a novel 3-D fabrication technology, we have demonstrated, for the first time, very high frequency and high quality factor (Q) inductors and transformers on Si substrate. On high resistivity Si, this technology achieves a quality factor of Q>60 for 1nH inductor at frequencies of 3 to 7 GHz. High efficiency high-Q transformers with coupling factors 0.6

author list (cited authors)

  • Weon, D., Jeon, J., Kim, J., Mohammadi, S., & Katehi, L.

citation count

  • 18

publication date

  • January 2004