High-Q Integrated 3-D Inductors and Transformers for High Frequency Applications Conference Paper uri icon

abstract

  • Using a novel 3-D fabrication technology, we have demonstrated, for the first time, very high frequency and high quality factor (Q) inductors and transformers on Si substrate. On high resistivity Si, this technology achieves a quality factor of Q>60 for 1nH inductor at frequencies of 3 to 7 GHz. High efficiency high-Q transformers with coupling factors 0.6

name of conference

  • 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)

published proceedings

  • 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)

author list (cited authors)

  • Weon, D., Jong-Hyeok Jeon, .., Jeong-Il Kim, .., Mohammadi, S., & Katehi, L.

citation count

  • 20

complete list of authors

  • Weon, D||Mohammadi, S||Katehi, LPB

publication date

  • January 2004

publisher