Highly Reliable Analog MEMS Varactors Conference Paper

abstract

• In this paper we report experimental results on the capacitive range, stability and reliability of low-cost and high-performance analog MEMS varactors. Our varactors are contact-less, parallel-plate devices with a tuning range of nearly 3:1 and high maximum capacitance value of 272 fF. Total lack of ohmic and dielectric contacts considerably enhances the robustness of our proposed varactor, which does not require a hermetically sealed package and can be therefore produced at a very low cost. Reliability measurements of package-free varactors exposed to a regular laboratory environment for over three months are presented. Furthermore, non-linear effects for structures undergoing large deflections are experimentally addressed in this paper by demonstrating optimized varactors with nearly-ideal C - V curves.

name of conference

• 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)

authors

• Katehi, Linda

published proceedings

• 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)

author list (cited authors)

• Peroulis, D., Lu, Y., & Katehi, L.

citation count

• 10

complete list of authors

• Peroulis, Dimitrios||Lu, Yumin||Katehi, Linda PB

publication date

• January 2004

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 272 Ff
• Analog Computers
• Capacitance
• Capacitive Range
• Computer Science
• Contact-less Parallel-plate Devices
• Current-voltage Curves
• Dielectric Contacts Lack
• Hermetic Seals
• Highly Reliable Analog Mems Varactors
• Micromechanical Devices
• Microswitches
• Microwave Devices
• Nonlinear Effects
• Ohmic Contacts Lack
• Package-free Varactors
• Packaging
• Radiofrequency Microelectromechanical Systems
• Reliability
• Robustness
• STABILITY
• Tuning Range
• Varactors

Digital Object Identifier (DOI)

• 10.1109/mwsym.2004.1339107

start page

• 869

end page

• 872

volume

• 2

URL

• http://dx.doi.org/10.1109/mwsym.2004.1339107