A Horizontally Integrated Micromachined Filter Conference Paper

abstract

• A 32 GHz filter constructed of micromachined cavities in silicon is presented. The filter structure consists of two side-by-side, horizontally-oriented cavities, which are coupled by evanescent waveguide sections, and are fed by microstrip lines through slot apertures. The measured results are presented and compared to those predicted by an FEM model. The simulated filter response has a bandwidth of 2.3% centered at 31.74 GHz with an insertion loss of 1.2 dB. The measured performance indicates a 2.2% bandwidth centered at 31.70 GHz with a de-embedded insertion loss of 1.2 dB, and an unloaded Q of 1422.

name of conference

• 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)

authors

• Katehi, Linda

published proceedings

• 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)

author list (cited authors)

• Harle, L., & Katehi, L.

citation count

• 10

complete list of authors

• Harle, Lee||Katehi, Linda PB

publication date

• January 2004

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 1.2 Db
• 31.70 Ghz
• 31.74 Ghz
• 32 Ghz
• 32 Ghz Filter
• Band-pass Filters
• Bandwidth
• Cavity Resonator Filters
• Cavity Resonators
• Chebyshev Approximation
• Chebyshev Filters
• Coupled Evanescent Waveguide
• De-embedded Insertion Loss
• Fem
• Finite Element Analysis
• Horizontally Integrated Micromachined Filter
• Horizontally-oriented Cavities
• Insertion Loss
• Micromachined Silicon Cavities
• Micromachining
• Microstrip Line
• Microstrip Lines
• Microstrip Transitions
• Microwave Filters
• Millimetre Wave Filters
• Packaging
• Performance Loss
• Resonator Filters
• Silicon
• Slot Apertures
• Slot Lines
• Virtual Prototyping
• Waveguide Couplers

Digital Object Identifier (DOI)

• 10.1109/mwsym.2004.1336003

start page

• 437

end page

• 440

volume

• 2

URL

• http://dx.doi.org/10.1109/mwsym.2004.1336003