A novel MEMS impedance tuner simultaneously optimized for maximum impedance range and power handling Conference Paper uri icon


  • This paper introduces a novel design technique for developing microwave MEMS impedance tuners. Unlike existing designs we simultaneously optimize both the impedance coverage and power handling of the tuner. This allows the tuner to be used in real-life load-pull systems where power handling is equally important to impedance tuning. We further increase the power handling by utilizing contact-less MEMS varactors that can reliably handle more than 3.5 W of power. These principles are demonstrated with a 30 GHz tuner that exhibits very wide impedance tuning and an improvement of 4.5 times (compared to conventional MEMS designs) in terms of the power it can deliver.

name of conference

  • IEEE MTT-S International Microwave Symposium Digest, 2005.

published proceedings

  • IEEE MTT-S International Microwave Symposium Digest, 2005.

author list (cited authors)

  • Yumin Lu, .., L. P. B. Katehi, .., & D. Peroulis.

publication date

  • January 1, 2005 11:11 AM