A novel MEMS impedance tuner simultaneously optimized for maximum impedance range and power handling Conference Paper

abstract

• This paper introduces a novel design technique for developing microwave MEMS impedance tuners. Unlike existing designs we simultaneously optimize both the impedance coverage and power handling of the tuner. This allows the tuner to be used in real-life load-pull systems where power handling is equally important to impedance tuning. We further increase the power handling by utilizing contact-less MEMS varactors that can reliably handle more than 3.5 W of power. These principles are demonstrated with a 30 GHz tuner that exhibits very wide impedance tuning and an improvement of 4.5 times (compared to conventional MEMS designs) in terms of the power it can deliver.

name of conference

• IEEE MTT-S International Microwave Symposium Digest, 2005.

authors

• Katehi, Linda

published proceedings

• IEEE MTT-S International Microwave Symposium Digest, 2005.

author list (cited authors)

• Yumin Lu, .., L. P. B. Katehi, .., & D. Peroulis.

publication date

• January 2005

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 30 Ghz
• Capacitors
• Circuit Tuning
• Contact-less Mems Varactors
• Design Optimization
• Impedance
• Impedance Matching
• Impedance Tuning
• Load-pull Systems
• Mems Capacitor
• Mems Impedance Tuner
• Micromechanical Devices
• Microswitches
• Microwave Circuits
• Microwave Tuners
• Power Handling
• Power Transmission Lines
• Radio Frequency
• Switches
• Tuners
• Varactors

start page

• 4 pp.

end page

• 930