AC actuation of fixed-fixed beam MEMS switches Conference Paper

abstract

• In this paper, an actuation scheme of RF microelectromechanical systems (MEMS) switches based on a combined DC and AC actuation voltage (AC actuation) is proposed and numerically simulated. Compared to the conventional electrostatic actuation, AC actuation requires a much smaller actuation voltage, which is more suitable for low-voltage application, including wireless phones and sensors. The frequency of the AC component (actuation frequency) is very close to the mechanical resonant frequency of the MEMS structure beam. A parametric study on the effects of switch geometry, residual stress, and quality factor on the switch actuation voltage and switching time is performed in this work and specific design guidelines are provided for practical designs

name of conference

• Digest of Papers. 2006 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

authors

• Katehi, Linda

published proceedings

• Digest of Papers. 2006 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

author list (cited authors)

• X. Wang, .., L. P. B. Katehi, .., & D. Peroulis.

publication date

• January 2006

keywords

• Ac Actuation
• Electrostatic Actuation
• Electrostatic Actuators
• Fixed-fixed Beam Mems Switches
• Frequency
• Internal Stresses
• Mechanical Sensors
• Micromechanical Devices
• Microswitches
• Microwave Switches
• Numerical Simulation
• Q-factor
• Quality Factor
• Radiofrequency Microelectromechanical Systems
• Residual Stress
• Rf Mems Switches
• Rf Microelectromechanical Systems
• Switch Actuation Voltage
• Switch Geometry
• Switches
• Switching Time
• Voltage
• Wireless Sensor Networks

start page

• 4

end page

• pp.