3-D Integrated Inductors and Transformers on Liquid Crystal Polymer Substrate Conference Paper uri icon

abstract

  • We have designed, fabricated, and tested inductors and transformers on LCP substrate which exhibit high Q and high self-resonant frequency using a 3-D fabrication technology. A 1.1nH inductor in this work achieves a quality factor Q of 76 at 12GHz, with Q over 60 for frequencies from 8 to 18GHz. A 1:1 ratio transformer with coupling factors, k of higher than 0.6 and a self resonance frequency of 23GHz is also fabricated and tested. The technology for these inductors and transformers is based on one step Cr/Au metal deposition and electroplating

author list (cited authors)

  • Weon, D., Katehi, L., & Mohammadi, S.

citation count

  • 2

publication date

  • January 2006

publisher