Low-Loss Coplanar Waveguide Transmission Lines and Vertical Interconnects on Multi-Layer Parylene-N Conference Paper

abstract

• Coplanar waveguide transmission lines and vertical interconnects are implemented on a thick (15 mum) Parylene-N dielectric layer over a lossy CMOS-grade Si substrate. Devices are measured up to 40 GHz and show very low loss behavior. Low loss tangent and low dielectric constant characteristics of Parylene-N result in significant improvement of transmission lines and interconnects compared to those implemented in a standard Si integrated circuit technology.

name of conference

• 2009 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

authors

• Katehi, Linda

published proceedings

• 2009 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

author list (cited authors)

• Lahiji, R. R., Sharifi, H., Mohammadi, S., & Katehi, L.

citation count

• 6

complete list of authors

• Lahiji, RR||Sharifi, H||Mohammadi, S||Katehi, LPB

publication date

• January 2009

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

keywords

• Cmos
• Coplanar Transmission Lines
• Coplanar Waveguide
• Coplanar Waveguides
• Dielectric Constant
• Dielectric Layer
• Dielectric Loss Measurement
• Dielectric Losses
• Dielectric Measurements
• Dielectric Substrates
• Integrated Circuit Interconnections
• Loss Measurement
• Low Loss Tangent Characteristics
• Multilayer Parylene-n
• Organic Compounds
• Permittivity
• Propagation Losses
• Si
• Transmission Line Measurements
• Transmission Lines
• Vertical Interconnects

Digital Object Identifier (DOI)

• 10.1109/smic.2009.4770533

start page

• 1

end page

• 4

volume

• 1

URL

• http://dx.doi.org/10.1109/smic.2009.4770533