Power Handling Capability of High-Q Evanescent-mode RF MEMS Resonators with Flexible Diaphragm Conference Paper

abstract

• In this paper, we present theoretical and experimental investigations into the power handling capability of high-Q evanescent-mode RF MEMS tunable resonators based on electrostatically-actuated thin diaphragm tuner. The self-biasing of the diaphragm tuner from RF signal has been found to cause non-linear effects such as resonant frequency drift, frequency response distortion and instability. A non-linear circuit model has been proposed to predict such non-linearities and provide design guidelines for high power applications. Large signal measurement on a high-Q evanescent-mode resonator with no DC biasing shows good agreement with theoretical predictions.

name of conference

• 2009 Asia Pacific Microwave Conference

authors

• Katehi, Linda

published proceedings

• APMC: 2009 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5

author list (cited authors)

• Liu, X., Katehi, L., Chappell, W. J., & Peroulis, D.

citation count

• 7

complete list of authors

• Liu, Xiaoguang||Katehi, Linda PB||Chappell, William J||Peroulis, Dimitrios

publication date

• December 2009

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• APMC: 2009 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5  Journal

keywords

• Evanescent-mode Cavity
• MEMS
• Non-linearity
• Quality Factor
• Self-biasing
• Tunable Resonator

Digital Object Identifier (DOI)

• 10.1109/apmc.2009.5385409

International Standard Book Number (ISBN) 13

• 978-1-4244-2801-4

start page

• 194

end page

• +

URL

• http://dx.doi.org/10.1109/apmc.2009.5385409