Impact of Mechanical Vibration on the Performance of RF MEMS Evanescent-Mode Tunable Resonators Academic Article

abstract

• This letter presents the first experimental investigation on the impact of mechanical vibration on the performance of MEMS evanescent-mode tunable resonators. It is shown both conceptually and experimentally that mechanical vibration can introduce distortions to the RF signal. Signal distortions are found to be very small (<; -40 dBc of sideband or <; 0.5% change in-error vector magnitude) for a diaphragm based MEMS tunable resonator with a diaphragm size of 7 7 mm2 and mechanical vibration amplitude of 1g. A novel MEMS tunable evanescent-mode resonator based on two arrays of cantilever beams that replace the diaphragm is also presented to achieve even lower distortion in the presence of mechanical vibration. A 15-25 dB reduction in the vibration-induced sideband is observed.

authors

• Katehi, Linda

published proceedings

• IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS

altmetric score

• 3

author list (cited authors)

• Liu, X., Small, J., Berdy, D., Katehi, L., Chappell, W. J., & Peroulis, D.

citation count

• 11

complete list of authors

• Liu, Xiaoguang||Small, Joshua||Berdy, David||Katehi, Linda PB||Chappell, William J||Peroulis, Dimitrios

publication date

• August 2011

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Microwave and Wireless Components Letters  Journal

keywords

• Error Vector Magnitude (evm)
• Rf Mems
• Tunable Resonator
• Vibration

Digital Object Identifier (DOI)

• 10.1109/LMWC.2011.2160159

start page

• 406

end page

• 408

volume

• 21

issue

• 8

URL

• http://dx.doi.org/10.1109/lmwc.2011.2160159