Capacitive Monitoring of Electrostatic MEMS Tunable Evanescent-Mode Cavity Resonators Conference Paper

abstract

• This paper presents for the first time a novel concept for monitoring the resonant frequency of electrostatic MEMS tunable high-Q evanescent-mode cavity resonators through capacitance measurement. The proposed scheme relies on the fact that there is a one-to-one correspondence between the actuation capacitance Cs and the resonant frequency f0. This relationship is derived theoretically using a spring-mass model. The proposed monitoring concept is then validated by static measurement using a capacitance meter. Discussions are given on implementing a dynamic monitoring scheme by using custom-designed integrated high-speed CMOS capacitance sensors.

name of conference

• 2011 6th European Microwave Integrated Circuit Conference

authors

• Katehi, Linda

published proceedings

• 2011 6TH EUROPEAN MICROWAVE INTEGRATED CIRCUIT CONFERENCE

author list (cited authors)

• Liu, X., Fruehling, A., Katehi, L., Chappell, W. J., & Peroulis, D.

complete list of authors

• Liu, Xiaoguang||Fruehling, Adam||Katehi, Linda PB||Chappell, William J||Peroulis, Dimitrios

publication date

• January 2011

keywords

• Evanescent-mode Resonator
• Feedback Control
• Tunable Resonator

start page

• 466

end page

• 469