Design of low actuation voltage RF MEMS switch Conference Paper uri icon


  • Low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation. The RF MEMS switches were fabricated via a surface micromachining process using P12545 polyimide as the sacrificial layer. The switch structure was composed of electroplated nickel and the serpentine folded suspensions had a varying number of meanders from 1 to 5. DC measurements indicate actuation voltages as low as 9 V with an on-to-off capacitance ratio of 48. Power handling measurement results showed no "self-biasing" or failure of the MEMS switches for power levels up to 6.6 W. RF measurements demonstrate an isolation of -26 dB at 40 GHz.

name of conference

  • 2000 IEEE MTT-S International Microwave Symposium Digest

published proceedings

  • 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017)

altmetric score

  • 3

author list (cited authors)

  • Pacheco, S. P., Katehi, L., & Nguyen, C.

citation count

  • 157

complete list of authors

  • Pacheco, SP||Katehi, LPB||Nguyen, CT-C

publication date

  • January 2000