Design of low actuation voltage RF MEMS switch Conference Paper

abstract

• Low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation. The RF MEMS switches were fabricated via a surface micromachining process using P12545 polyimide as the sacrificial layer. The switch structure was composed of electroplated nickel and the serpentine folded suspensions had a varying number of meanders from 1 to 5. DC measurements indicate actuation voltages as low as 9 V with an on-to-off capacitance ratio of 48. Power handling measurement results showed no "self-biasing" or failure of the MEMS switches for power levels up to 6.6 W. RF measurements demonstrate an isolation of -26 dB at 40 GHz.

name of conference

• 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017)

authors

• Katehi, Linda

published proceedings

• 2000 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3

altmetric score

• 3

author list (cited authors)

• Pacheco, S. P., Katehi, L., & Nguyen, C.

citation count

• 161

complete list of authors

• Pacheco, SP||Katehi, LPB||Nguyen, CTC

publication date

• January 2000

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium  Journal

keywords

• 40 Ghz
• 6.6 W
• 9 V
• Actuation Voltage
• Actuation Voltages
• Actuators
• Capacitive Actuators
• Dc Measurements
• Electroplated Nickel
• Low Voltage
• Low-power Electronics
• Mems Switch
• Microactuators
• Microelectromechanical Systems
• Micromachining
• Micromechanical Devices
• Microwave Microelectromechanical Systems
• Microwave Switches
• Off-state Isolation
• On-to-off Capacitance Ratio
• Polyimide
• Power Handling Measurement
• Power Levels
• Power Measurement
• Radiofrequency Microelectromechanical Systems
• Rf Measurements
• Sacrificial Layer
• Serpentine Folded Suspensions
• Serpentine Spring Folded Suspensions
• Shunt Switches
• Springs
• Surface Micromachining Process
• Suspensions
• Switches

Digital Object Identifier (DOI)

• 10.1109/mwsym.2000.860921

International Standard Book Number (ISBN) 10

• 0-7803-5687-X

start page

• 165

end page

• 168

volume

• 1

URL

• http://dx.doi.org/10.1109/mwsym.2000.860921