RF W-band wafer-to-wafer transition
- Additional Document Info
- View All
Multiwafer silicon designs must provide an avenue for electrical signals to flow from wafer to wafer. For this purpose, a two-layer electrical bond is proposed to provide electrical connection between two coplanar waveguides on vertically stacked silicon wafers. Loss of approximately 0.1 dB is measured for this compact, packaged transition at W-band.
author list (cited authors)
Herrick, K. J., & Katehi, L.