A fully packaged finite-ground coplanar line-to-micromachined waveguide transition
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abstract
A novel, fully packaged planar line-to-silicon micromachined waveguide transition is investigated. Measured results for a Ka-band transition to a conventional metal waveguide are given. Full-wave simulations on a modified structure transfer this design to W-band to demonstrate the potential for a fully packaged low-cost silicon counterpart.
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IEEE 9th Topical Meeting on Electrical Performance of Electronic Packaging (Cat. No.00TH8524)